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Fabrication and Properties of an Epitaxial AIN Film on a SiC Substrate by Using Reactive RF Magnetron Sputtering
Fabrication and Properties of an Epitaxial AIN Film on a SiC Substrate by Using Reactive R...
Fabrication and Properties of an Epitaxial AIN Film on a SiC Substrate by Using Reactive RF Magnetron Sputtering

Detailed Information

자료유형  
 기사
ISSN  
03744884
저자명  
Kim, Kwang-ho
서명/저자  
Fabrication and Properties of an Epitaxial AIN Film on a SiC Substrate by Using Reactive RF Magnetron Sputtering / Kwang-ho Kim 저 , Yong-seong Kim , Sang-hyun Jeong , Soon-won Jung , Soo Hong Lee 공저
발행사항  
서울 : 한국물리학회, 2006.
형태사항  
pp. 275-278
키워드  
FABRICATION PROPERTIES EPITAXIAL FILM SIC SUBSTRATE USING REACTIVE RF MAGNETRON SPUTTERING
기타저자  
Kim, Yong-seong
기타저자  
Jeong, Sang-hyun
기타저자  
Jung, Soon-won
기타저자  
Lee, Soo Hong
기본자료저록  
Journal of The Korean Physical Society : Vol. 48 No. 2 (2006. 2) 2006, 02
URL  
http://www.kps.or.kr
Control Number  
kjul:60096578

MARC

 008070405s2006        ULKa    a                          ENG
■022    ▼a03744884
■1001  ▼aKim,    Kwang-ho  
■245    ▼aFabrication  and  Properties  of  an  Epitaxial  AIN  Film  on  a  SiC  Substrate  by  Using  Reactive  RF  Magnetron  Sputtering▼dKwang-ho  Kim  저▼eYong-seong  Kim▼eSang-hyun  Jeong▼eSoon-won  Jung▼eSoo  Hong  Lee  공저
■260    ▼a서울▼b한국물리학회▼c2006.
■300    ▼app.  275-278
■653    ▼aFABRICATION▼aPROPERTIES▼aEPITAXIAL▼aFILM▼aSIC▼aSUBSTRATE▼aUSING▼aREACTIVE▼aRF▼aMAGNETRON▼aSPUTTERING
■7001  ▼aKim,  Yong-seong  
■7001  ▼aJeong,  Sang-hyun  
■7001  ▼aJung,  Soon-won  
■7001  ▼aLee,  Soo  Hong  
■773    ▼tJournal  of  The  Korean  Physical  Society▼gVol.  48  No.  2  (2006.  2)▼d2006,  02
■■URL    ▼ahttp://www.kps.or.kr

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