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On the Design of the Latch Mecahnism for Wafer Containers in a SMIF Environment
On the Design of the Latch Mecahnism for Wafer Containers in a SMIF Environment
상세정보
- 자료유형
- 기사
- ISSN
- 1738494X
- 저자명
- Jyh-Jone Lee.
- 서명/저자
- On the Design of the Latch Mecahnism for Wafer Containers in a SMIF Environment / Jyh-Jone Lee. , Dar-Zen Chen , Wei-Ming Pai , Tzong-Ming Wu.
- 발행사항
- 서울 : 대한기계학회, 2006.
- 형태사항
- pp. 2025-2033
- 기타저자
- Dar-Zen Chen
- 기타저자
- Wei-Ming Pai
- 기타저자
- Tzong-Ming Wu.
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60095596
MARC
008070327s2006 ULKa a ENG■022 ▼a1738494X
■1001 ▼aJyh-Jone Lee.
■245 ▼aOn the Design of the Latch Mecahnism for Wafer Containers in a SMIF Environment ▼dJyh-Jone Lee.▼eDar-Zen Chen▼eWei-Ming Pai▼eTzong-Ming Wu.
■260 ▼a서울▼b대한기계학회▼c2006.
■300 ▼app. 2025-2033
■653 ▼aDESIGN▼aLATCH▼aMECAHNISM▼aWAFER▼aCONTAINERS▼aSMIF▼aENVIRONMENT
■7001 ▼aDar-Zen Chen
■7001 ▼aWei-Ming Pai
■7001 ▼aTzong-Ming Wu.
■773 ▼tJournal of Mechanical Science and Technology▼gVol. 20 (No. 12)▼d2006, 12
■SIS ▼aS036819▼b60064619▼h8▼s2
