서브메뉴
검색
On the Design of the Latch Mecahnism for Wafer Containers in a SMIF Environment
On the Design of the Latch Mecahnism for Wafer Containers in a SMIF Environment
Detailed Information
- Material Type
- 기사
- ISSN
- 1738494X
- Author
- Jyh-Jone Lee.
- Title/Author
- On the Design of the Latch Mecahnism for Wafer Containers in a SMIF Environment / Jyh-Jone Lee. ; Dar-Zen Chen ; Wei-Ming Pai ; Tzong-Ming Wu.
- Publish Info
- 서울 : 대한기계학회, 2006.
- Material Info
- pp. 2025-2033
- Index Term-Uncontrolled
- DESIGN LATCH MECAHNISM WAFER CONTAINERS SMIF ENVIRONMENT
- Added Entry-Personal Name
- Dar-Zen Chen
- Added Entry-Personal Name
- Wei-Ming Pai
- Added Entry-Personal Name
- Tzong-Ming Wu.
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60095596
MARC
008070327s2006 ULKa a ENG■022 ▼a1738494X
■1001 ▼aJyh-Jone Lee.
■245 ▼aOn the Design of the Latch Mecahnism for Wafer Containers in a SMIF Environment ▼dJyh-Jone Lee.▼eDar-Zen Chen▼eWei-Ming Pai▼eTzong-Ming Wu.
■260 ▼a서울▼b대한기계학회▼c2006.
■300 ▼app. 2025-2033
■653 ▼aDESIGN▼aLATCH▼aMECAHNISM▼aWAFER▼aCONTAINERS▼aSMIF▼aENVIRONMENT
■7001 ▼aDar-Zen Chen
■7001 ▼aWei-Ming Pai
■7001 ▼aTzong-Ming Wu.
■773 ▼tJournal of Mechanical Science and Technology▼gVol. 20 (No. 12)▼d2006, 12
■SIS ▼aS036819▼b60064619▼h8▼s2
Preview
Export
ChatGPT Discussion
AI Recommended Related Books
Detail Info.
- Reservation
- Not Exist
- My Folder
- Reference Materials for Thesis Writing
- Reference Materials for Research Ethics
- Job-Related Books
