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Evaluation of a Wafer Transportation Speed for Propulsion Nozzle Array on Air Levitation System
Evaluation of a Wafer Transportation Speed for Propulsion Nozzle Array on Air Levitation System
Detailed Information
- 자료유형
- 기사
- ISSN
- 1738494X
- 저자명
- In Ho Moon.
- 서명/저자
- Evaluation of a Wafer Transportation Speed for Propulsion Nozzle Array on Air Levitation System / In Ho Moon. , Young-Kyu Hwang.
- 발행사항
- 서울 : 대한기계학회, 2006.
- 형태사항
- pp. 1492-1501
- 기타저자
- Young-Kyu Hwang.
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60095125
MARC
008070326s2006 ULKa a ENG■022 ▼a1738494X
■1001 ▼aIn Ho Moon.
■245 ▼aEvaluation of a Wafer Transportation Speed for Propulsion Nozzle Array on Air Levitation System▼dIn Ho Moon.▼eYoung-Kyu Hwang.
■260 ▼a서울▼b대한기계학회▼c2006.
■300 ▼app. 1492-1501
■653 ▼aEVALUATION▼aWAFER▼aTRANSPORTATION▼aSPEED▼aPROPULSION▼aNOZZLE▼aARRAY▼aAIR▼aLEVITATION▼aSYSTEM
■7001 ▼aYoung-Kyu Hwang.
■773 ▼tJournal of Mechanical Science and Technology▼gVol. 20 (No. 9)▼d2006, 09
■SIS ▼aS032574▼b60064619▼h8▼s2
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