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Friction Mechanisms of Silicon Wafer and Silicon Wafer Coated with Diamond like Carbon Film and Two Monolayers
Friction Mechanisms of Silicon Wafer and Silicon Wafer Coated with Diamond like Carbon Film and Two Monolayers
Detailed Information
- Material Type
- 기사
- ISSN
- 1738494X
- Author
- R. Arvind Singh.
- Title/Author
- Friction Mechanisms of Silicon Wafer and Silicon Wafer Coated with Diamond like Carbon Film and Two Monolayers / R. Arvind Singh. ; Eui-Sung Yoon ; Hung-Gu Han ; Hosung Kong.
- Publish Info
- 서울 : 대한기계학회, 2006.
- Material Info
- pp. 738-747
- Index Term-Uncontrolled
- FRICTION MECHANISMS SILICON WAFER COATED DIAMOND LIKE CARBON FILM TWO MONOLAYERS
- Added Entry-Personal Name
- Eui-Sung Yoon
- Added Entry-Personal Name
- Hung-Gu Han
- Added Entry-Personal Name
- Hosung Kong.
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60094902
MARC
008070323s2006 ULKa a ENG■022 ▼a1738494X
■1001 ▼aR. Arvind Singh.
■245 ▼aFriction Mechanisms of Silicon Wafer and Silicon Wafer Coated with Diamond like Carbon Film and Two Monolayers▼dR. Arvind Singh.▼eEui-Sung Yoon▼eHung-Gu Han▼eHosung Kong.
■260 ▼a서울▼b대한기계학회▼c2006.
■300 ▼app. 738-747
■653 ▼aFRICTION▼aMECHANISMS▼aSILICON▼aWAFER▼aCOATED▼aDIAMOND▼aLIKE▼aCARBON▼aFILM▼aTWO▼aMONOLAYERS
■7001 ▼aEui-Sung Yoon
■7001 ▼aHung-Gu Han
■7001 ▼aHosung Kong.
■773 ▼tJournal of Mechanical Science and Technology▼gVol. 20 (No. 6)▼d2006, 06
■SIS ▼aS027163▼b60064619▼h8▼s2
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