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A Novel Test Structure for Process Control Monitor for Un-Cooled Bolometer Area Array Detector Technology
A Novel Test Structure for Process Control Monitor for Un-Cooled Bolometer Area Array Detector Technology
Detailed Information
- 자료유형
- 기사
- ISSN
- 15981657
- 저자명
- R. S. Saxena.
- 서명/저자
- A Novel Test Structure for Process Control Monitor for Un-Cooled Bolometer Area Array Detector Technology / R. S. Saxena. , R. K. Bhan , C. R. Jalwania , S. K. Lomash.
- 발행사항
- 서울 : 대한전자공학회, 2006.
- 형태사항
- pp. 299-312
- 기타저자
- R. K. Bhan
- 기타저자
- C. R. Jalwania
- 기타저자
- S. K. Lomash.
- 기본자료저록
- Journal of Semiconductor Technology and Science : Volume 6, Number 4, (2006 December) 2006, 12
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60094334
MARC
008070321s2006 ULKa a ENG■022 ▼a15981657
■1001 ▼aR. S. Saxena.
■245 ▼aA Novel Test Structure for Process Control Monitor for Un-Cooled Bolometer Area Array Detector Technology▼dR. S. Saxena.▼eR. K. Bhan▼eC. R. Jalwania▼eS. K. Lomash.
■260 ▼a서울▼b대한전자공학회▼c2006.
■300 ▼app. 299-312
■653 ▼aNOVEL▼aTEST▼aSTRUCTURE▼aPROCESS▼aCONTROL▼aMONITOR▼aUNCOOLED▼aBOLOMETER▼aAREA▼aARRAY▼aDETECTOR▼aTECHNOLOGY
■7001 ▼aR. K. Bhan
■7001 ▼aC. R. Jalwania
■7001 ▼aS. K. Lomash.
■773 ▼tJournal of Semiconductor Technology and Science▼gVolume 6, Number 4, (2006 December)▼d2006, 12
■SIS ▼aS037327▼b60054120▼h8▼s2
