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Fabrication and Electrical Properties of Local Damascene FinFET Cell Array in Sub-60nm Feature Sized DRAM
Fabrication and Electrical Properties of Local Damascene FinFET Cell Array in Sub-60nm Feature Sized DRAM
상세정보
- 자료유형
- 기사
- ISSN
- 15981657
- 저자명
- Yong-Sung Kim.
- 서명/저자
- Fabrication and Electrical Properties of Local Damascene FinFET Cell Array in Sub-60nm Feature Sized DRAM / Yong-Sung Kim. , Soo Ho Shin , Sung Hee Han , Seung Chul Yang , Joon Ho Sung , Dong-Jun Lee , Jin Woo Lee , Tae Young Chung.
- 발행사항
- 서울 : 대한전자공학회, 2006.
- 형태사항
- pp. 61-67
- 기타저자
- Soo Ho Shin
- 기타저자
- Sung Hee Han
- 기타저자
- Seung Chul Yang
- 기타저자
- Joon Ho Sung
- 기타저자
- Dong-Jun Lee
- 기타저자
- Jin Woo Lee
- 기타저자
- Tae Young Chung.
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60093991
MARC
008070320s2006 ULKa a ENG■022 ▼a15981657
■1001 ▼aYong-Sung Kim.
■245 ▼aFabrication and Electrical Properties of Local Damascene FinFET Cell Array in Sub-60nm Feature Sized DRAM▼dYong-Sung Kim.▼eSoo Ho Shin▼eSung Hee Han▼eSeung Chul Yang▼eJoon Ho Sung▼eDong-Jun Lee▼eJin Woo Lee▼eTae Young Chung.
■260 ▼a서울▼b대한전자공학회▼c2006.
■300 ▼app. 61-67
■653 ▼aFABRICATION▼aELECTRICAL▼aPROPERTIES▼aLOCAL▼aDAMASCENE▼aFINFET▼aCELL▼aARRAY▼aSUB60NM▼aFEATURE▼aSIZED▼aDRAM
■7001 ▼aSoo Ho Shin
■7001 ▼aSung Hee Han
■7001 ▼aSeung Chul Yang
■7001 ▼aJoon Ho Sung
■7001 ▼aDong-Jun Lee
■7001 ▼aJin Woo Lee
■7001 ▼aTae Young Chung.
■773 ▼tJournal of Semiconductor Technology and Science▼gVolume 6, Number 2, (2006 June)▼d2006, 06
■SIS ▼aS027450▼b60054120▼h8▼s2
