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Fabrication and Electrical Properties of Local Damascene FinFET Cell Array in Sub-60nm Feature Sized DRAM
Fabrication and Electrical Properties of Local Damascene FinFET Cell Array in Sub-60nm Fea...
Fabrication and Electrical Properties of Local Damascene FinFET Cell Array in Sub-60nm Feature Sized DRAM

Detailed Information

자료유형  
 기사
ISSN  
15981657
저자명  
Yong-Sung Kim.
서명/저자  
Fabrication and Electrical Properties of Local Damascene FinFET Cell Array in Sub-60nm Feature Sized DRAM / Yong-Sung Kim. , Soo Ho Shin , Sung Hee Han , Seung Chul Yang , Joon Ho Sung , Dong-Jun Lee , Jin Woo Lee , Tae Young Chung.
발행사항  
서울 : 대한전자공학회, 2006.
형태사항  
pp. 61-67
키워드  
FABRICATION ELECTRICAL PROPERTIES LOCAL DAMASCENE FINFET CELL ARRAY SUB60NM FEATURE SIZED DRAM
기타저자  
Soo Ho Shin
기타저자  
Sung Hee Han
기타저자  
Seung Chul Yang
기타저자  
Joon Ho Sung
기타저자  
Dong-Jun Lee
기타저자  
Jin Woo Lee
기타저자  
Tae Young Chung.
기본자료저록  
Journal of Semiconductor Technology and Science : Volume 6, Number 2, (2006 June) 2006, 06
모체레코드  
모체정보확인
Control Number  
kjul:60093991

MARC

 008070320s2006        ULKa    a                          ENG
■022    ▼a15981657
■1001  ▼aYong-Sung  Kim.
■245    ▼aFabrication  and  Electrical  Properties  of  Local  Damascene  FinFET  Cell  Array  in  Sub-60nm  Feature  Sized  DRAM▼dYong-Sung  Kim.▼eSoo  Ho  Shin▼eSung  Hee  Han▼eSeung  Chul  Yang▼eJoon  Ho  Sung▼eDong-Jun  Lee▼eJin  Woo  Lee▼eTae  Young  Chung.
■260    ▼a서울▼b대한전자공학회▼c2006.
■300    ▼app.  61-67
■653    ▼aFABRICATION▼aELECTRICAL▼aPROPERTIES▼aLOCAL▼aDAMASCENE▼aFINFET▼aCELL▼aARRAY▼aSUB60NM▼aFEATURE▼aSIZED▼aDRAM
■7001  ▼aSoo  Ho  Shin
■7001  ▼aSung  Hee  Han
■7001  ▼aSeung  Chul  Yang
■7001  ▼aJoon  Ho  Sung
■7001  ▼aDong-Jun  Lee
■7001  ▼aJin  Woo  Lee
■7001  ▼aTae  Young  Chung.
■773    ▼tJournal  of  Semiconductor  Technology  and  Science▼gVolume  6,  Number  2,  (2006  June)▼d2006,  06
■SIS    ▼aS027450▼b60054120▼h8▼s2

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