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Improvement of Leakage Current Property of TIT Capacitor with Compositionally Stepped HfxAlyOz Thin Films
Improvement of Leakage Current Property of TIT Capacitor with Compositionally Stepped HfxAlyOz Thin Films
상세정보
- 자료유형
- 기사
- ISSN
- 17388090
- 저자명
- Deok Sin Kil
- 서명/저자
- Improvement of Leakage Current Property of TIT Capacitor with Compositionally Stepped HfxAlyOz Thin Films / Deok Sin Kil , Kwon Hong , Seung Jin Yeom
- 발행사항
- 서울 : 대한금속재료학회, 2006.
- 형태사항
- pp. 15-18
- 기타저자
- Kwon Hong
- 기타저자
- Seung Jin Yeom
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60092661
MARC
008070309s2006 ULKa a ENG■022 ▼a17388090
■1001 ▼aDeok Sin Kil
■245 ▼aImprovement of Leakage Current Property of TIT Capacitor with Compositionally Stepped HfxAlyOz Thin Films▼dDeok Sin Kil▼eKwon Hong▼eSeung Jin Yeom
■260 ▼a서울▼b대한금속재료학회▼c2006.
■300 ▼app. 15-18
■653 ▼aIMPROVEMENT▼aLEAKAGE▼aCURRENT▼aPROPERTY▼aTIT▼aCAPACITOR▼aCOMPOSITIONALLY▼aSTEPPED▼aHFXALYOZ▼aFILMS
■7001 ▼aKwon Hong
■7001 ▼aSeung Jin Yeom
■773 ▼tELECTRONIC MATERIALS Letters▼gVol. 2 No. 1▼d2006, 03
■SIS ▼aS028679▼b60077032▼h8▼s2
