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Estimating Relative Deposition Rates in a Multi-Source Continuous-Deposition Process Using a Single Composition
Estimating Relative Deposition Rates in a Multi-Source Continuous-Deposition Process Using a Single Composition
Detailed Information
- 자료유형
- 기사
- ISSN
- 10636536
- 저자명
- M. J. Hilt.
- 서명/저자
- Estimating Relative Deposition Rates in a Multi-Source Continuous-Deposition Process Using a Single Composition / M. J. Hilt. , T. L. Vincent , B. S. Joshi , L. J. Simpson.
- 발행사항
- New York, NY : Institute of Electrical and Electronics Engineers, 2006.
- 형태사항
- pp. 247-259
- 주기사항
- Includes Bibliography Reference
- 키워드
- ESTIMATING RELATIVE DEPOSITION RATES MULTISOURCE CONTINUOUSDEPOSITION PROCESS USING SINGLE COMPOSITION
- 기타저자
- T. L. Vincent
- 기타저자
- B. S. Joshi
- 기타저자
- L. J. Simpson.
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60089434
MARC
008070202s2006 ai eng■022 ▼a10636536
■1001 ▼aM. J. Hilt.
■245 ▼aEstimating Relative Deposition Rates in a Multi-Source Continuous-Deposition Process Using a Single Composition▼dM. J. Hilt.▼eT. L. Vincent▼eB. S. Joshi▼eL. J. Simpson.
■260 ▼aNew York, NY▼bInstitute of Electrical and Electronics Engineers▼c2006.
■300 ▼app. 247-259
■500 ▼aIncludes Bibliography Reference
■653 ▼aESTIMATING▼aRELATIVE▼aDEPOSITION▼aRATES▼aMULTISOURCE▼aCONTINUOUSDEPOSITION▼aPROCESS▼aUSING▼aSINGLE▼aCOMPOSITION
■7001 ▼aT. L. Vincent
■7001 ▼aB. S. Joshi
■7001 ▼aL. J. Simpson.
■773 ▼tIEEE transactions on control systems technology▼gVol. 14 No. 2 (2006. 3)▼d2006, 03
■SIS ▼aS029549▼b60077650▼h8▼s2
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