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AZO films prepared by facing target sputtering systems
AZO films prepared by facing target sputtering systems
Detailed Information
- 자료유형
- 기사
- ISSN
- 12297607
- 저자명
- Kim, Kyung-Hwan
- 서명/저자
- AZO films prepared by facing target sputtering systems / by Kyung-Hwan Kim
- 발행사항
- 서울 : 한국전기전자재료학회, 2007.
- 형태사항
- pp. 271-276
- Control Number
- kjul:60085956
MARC
008061214s2007 ULKa a ENG■022 ▼a12297607
■1001 ▼aKim, Kyung-Hwan
■245 ▼aAZO films prepared by facing target sputtering systems▼dby Kyung-Hwan Kim
■260 ▼a서울▼b한국전기전자재료학회▼c2007.
■300 ▼app. 271-276
■653 ▼aAZO▼aFILMS▼aPREPARED▼aFACING▼aTARGET▼aSPUTTERING▼aSYSTEMS
■773 ▼tTransactions on Electrical and Electronic Materials▼gVol.7, No.5 (2006 October)▼d2007, 10
■■URL ▼ahttp://www.kieeme.or.kr
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