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SF6 and O₂effects on PR ashing in N₂Atmosphericdielectric barrier discharge
SF6 and O₂effects on PR ashing in N₂Atmosphericdielectric barrier discharge
Detailed Information
- Material Type
- 기사
- ISSN
- 12297607
- Author
- Jeong, Soo-Yeon
- Title/Author
- SF6 and O₂effects on PR ashing in N₂Atmosphericdielectric barrier discharge / Soo-Yeon Jeong ; by Ji-Hun Kim ; Yong-Seuk Hwang ; Gon-Ho Kim
- Publish Info
- 서울 : 한국전기전자재료학회, 2007.
- Material Info
- pp. 204-209
- Added Entry-Personal Name
- Kim, Ji-Hun
- Added Entry-Personal Name
- Hwang, Yong-Seuk
- Added Entry-Personal Name
- Kim, Gon-Ho
- Host Item Entry
- Transactions on Electrical and Electronic Materials : Vol.7, No.4 (2006 August) 2007, 08
- Control Number
- kjul:60085908
MARC
008061213s2007 ULKa a ENG■022 ▼a12297607
■1001 ▼aJeong, Soo-Yeon
■245 ▼aSF6 and O₂effects on PR ashing in N₂Atmosphericdielectric barrier discharge▼dSoo-Yeon Jeong▼eby Ji-Hun Kim▼eYong-Seuk Hwang▼eGon-Ho Kim
■260 ▼a서울▼b한국전기전자재료학회▼c2007.
■300 ▼app. 204-209
■653 ▼aSF6▼aO₂EFFECTS▼aASHING▼aN₂ATMOSPHERICDIELECTRIC▼aBARRIER▼aDISCHARGE
■7001 ▼aKim, Ji-Hun
■7001 ▼aHwang, Yong-Seuk
■7001 ▼aKim, Gon-Ho
■773 ▼tTransactions on Electrical and Electronic Materials▼gVol.7, No.4 (2006 August)▼d2007, 08
■■URL ▼ahttp://www.kieeme.or.kr
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