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Demonstration of alternative favrication techniques for robust MEMS device
Demonstration of alternative favrication techniques for robust MEMS device
Detailed Information
- Material Type
- 기사
- ISSN
- 12297607
- Author
- Chang, Sung Pil
- Title/Author
- Demonstration of alternative favrication techniques for robust MEMS device / Sung Pil Chang ; by Je Young Park ; Doo Yeol Cha ; Heung Shik Lee
- Publish Info
- 서울 : 한국전기전자재료학회, 2007.
- Material Info
- pp. 184-188
- Index Term-Uncontrolled
- DEMONSTRATION ALTERNATIVE FAVRICATION TECHNIQUES ROBUST MEMS DEVICE
- Added Entry-Personal Name
- Park, Je Young
- Added Entry-Personal Name
- Cha, Doo Yeol
- Added Entry-Personal Name
- Lee, Heung Shik
- Host Item Entry
- Transactions on Electrical and Electronic Materials : Vol.7, No.4 (2006 August) 2007, 08
- Control Number
- kjul:60085893
MARC
008061213s2007 ULKa a ENG■022 ▼a12297607
■1001 ▼aChang, Sung Pil
■245 ▼aDemonstration of alternative favrication techniques for robust MEMS device▼dSung Pil Chang▼eby Je Young Park▼eDoo Yeol Cha▼eHeung Shik Lee
■260 ▼a서울▼b한국전기전자재료학회▼c2007.
■300 ▼app. 184-188
■653 ▼aDEMONSTRATION▼aALTERNATIVE▼aFAVRICATION▼aTECHNIQUES▼aROBUST▼aMEMS▼aDEVICE
■7001 ▼aPark, Je Young
■7001 ▼aCha, Doo Yeol
■7001 ▼aLee, Heung Shik
■773 ▼tTransactions on Electrical and Electronic Materials▼gVol.7, No.4 (2006 August)▼d2007, 08
■■URL ▼ahttp://www.kieeme.or.kr
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