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A study on lateral distribution of implanted Ions in silicon
A study on lateral distribution of implanted Ions in silicon / Won Chae Jung , by Hyung Mi...
A study on lateral distribution of implanted Ions in silicon

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자료유형  
 기사
ISSN  
12297607
저자명  
Jung, Won Chae
서명/저자  
A study on lateral distribution of implanted Ions in silicon / Won Chae Jung , by Hyung Min Kim
발행사항  
서울 : 한국전기전자재료학회, 2007.
형태사항  
pp. 173-179
키워드  
STUDY LATERAL DISTRIBUTION IMPLANTED IONS SILICON
기타저자  
Kim, Hyung Min
기본자료저록  
Transactions on Electrical and Electronic Materials : Vol.7, No.4 (2006 August) 2007, 08
URL  
http://www.kieeme.or.kr
Control Number  
kjul:60085891

MARC

 008061213s2007        ULKa    a                          ENG
■022    ▼a12297607
■1001  ▼aJung,  Won  Chae  
■245    ▼aA  study  on  lateral  distribution  of  implanted  Ions  in  silicon▼dWon  Chae  Jung▼eby  Hyung  Min  Kim
■260    ▼a서울▼b한국전기전자재료학회▼c2007.
■300    ▼app.  173-179
■653    ▼aSTUDY▼aLATERAL▼aDISTRIBUTION▼aIMPLANTED▼aIONS▼aSILICON
■7001  ▼aKim,  Hyung  Min  
■773    ▼tTransactions  on  Electrical  and  Electronic  Materials▼gVol.7,  No.4  (2006  August)▼d2007,  08
■■URL    ▼ahttp://www.kieeme.or.kr

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