서브메뉴
검색
Dishing and erosion evaluations of tungsten CMP slurry in the orbital polishing system
Dishing and erosion evaluations of tungsten CMP slurry in the orbital polishing system
Detailed Information
- Material Type
- 기사
- ISSN
- 12297607
- Author
- Lee, Sang-Ho
- Title/Author
- Dishing and erosion evaluations of tungsten CMP slurry in the orbital polishing system / Sang-Ho Lee ; by Young-Jae Kang ; Jin-Goo Park ; Pan-Ki Kwon ; Chang-Il Kim ; Chan-Kwon Oh ; Soo-Myoung Kim ; Myung S. Jhon ; Sean Hur ; Young-Jung Kim ; Bong-Ho Kim
- Publish Info
- 서울 : 한국전기전자재료학회, 2007.
- Material Info
- pp. 163-166
- Added Entry-Personal Name
- Kang, Young-Jae
- Added Entry-Personal Name
- Park, Jin-Goo
- Added Entry-Personal Name
- Kwon, Pan-Ki
- Added Entry-Personal Name
- Kim, Chang-Il
- Added Entry-Personal Name
- Oh, Chan-Kwon
- Added Entry-Personal Name
- Kim, Soo-Myoung
- Added Entry-Personal Name
- Jhon, Myung S.
- Added Entry-Personal Name
- Sean Hur
- Added Entry-Personal Name
- Kim, Young-Jung
- Added Entry-Personal Name
- Kim, Bong-Ho
- Host Item Entry
- Transactions on Electrical and Electronic Materials : Vol.7, No.4 (2006 August) 2007, 08
- Control Number
- kjul:60085889
MARC
008061213s2007 ULKa a ENG■022 ▼a12297607
■1001 ▼aLee, Sang-Ho
■245 ▼aDishing and erosion evaluations of tungsten CMP slurry in the orbital polishing system▼dSang-Ho Lee▼eby Young-Jae Kang▼eJin-Goo Park▼ePan-Ki Kwon▼eChang-Il Kim▼eChan-Kwon Oh▼eSoo-Myoung Kim▼eMyung S. Jhon▼eSean Hur▼eYoung-Jung Kim▼eBong-Ho Kim
■260 ▼a서울▼b한국전기전자재료학회▼c2007.
■300 ▼app. 163-166
■653 ▼aDISHING▼aEROSION▼aEVALUATIONS▼aTUNGSTEN▼aCMP▼aSLURRY▼aORBITAL▼aPOLISHING▼aSYSTEM
■7001 ▼aKang, Young-Jae
■7001 ▼aPark, Jin-Goo
■7001 ▼aKwon, Pan-Ki
■7001 ▼aKim, Chang-Il
■7001 ▼aOh, Chan-Kwon
■7001 ▼aKim, Soo-Myoung
■7001 ▼aJhon, Myung S.
■7001 ▼aSean Hur
■7001 ▼aKim, Young-Jung
■7001 ▼aKim, Bong-Ho
■773 ▼tTransactions on Electrical and Electronic Materials▼gVol.7, No.4 (2006 August)▼d2007, 08
■■URL ▼ahttp://www.kieeme.or.kr
Preview
Export
ChatGPT Discussion
AI Recommended Related Books
Detail Info.
- Reservation
- Not Exist
- My Folder
- Reference Materials for Thesis Writing
- Reference Materials for Research Ethics
- Job-Related Books
