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Dishing and erosion evaluations of tungsten CMP slurry in the orbital polishing system
Dishing and erosion evaluations of tungsten CMP slurry in the orbital polishing system
Detailed Information
- 자료유형
- 기사
- ISSN
- 12297607
- 저자명
- Lee, Sang-Ho
- 서명/저자
- Dishing and erosion evaluations of tungsten CMP slurry in the orbital polishing system / Sang-Ho Lee , by Young-Jae Kang , Jin-Goo Park , Pan-Ki Kwon , Chang-Il Kim , Chan-Kwon Oh , Soo-Myoung Kim , Myung S. Jhon , Sean Hur , Young-Jung Kim , Bong-Ho Kim
- 발행사항
- 서울 : 한국전기전자재료학회, 2007.
- 형태사항
- pp. 163-166
- 기타저자
- Kang, Young-Jae
- 기타저자
- Park, Jin-Goo
- 기타저자
- Kwon, Pan-Ki
- 기타저자
- Kim, Chang-Il
- 기타저자
- Oh, Chan-Kwon
- 기타저자
- Kim, Soo-Myoung
- 기타저자
- Jhon, Myung S.
- 기타저자
- Sean Hur
- 기타저자
- Kim, Young-Jung
- 기타저자
- Kim, Bong-Ho
- Control Number
- kjul:60085889
MARC
008061213s2007 ULKa a ENG■022 ▼a12297607
■1001 ▼aLee, Sang-Ho
■245 ▼aDishing and erosion evaluations of tungsten CMP slurry in the orbital polishing system▼dSang-Ho Lee▼eby Young-Jae Kang▼eJin-Goo Park▼ePan-Ki Kwon▼eChang-Il Kim▼eChan-Kwon Oh▼eSoo-Myoung Kim▼eMyung S. Jhon▼eSean Hur▼eYoung-Jung Kim▼eBong-Ho Kim
■260 ▼a서울▼b한국전기전자재료학회▼c2007.
■300 ▼app. 163-166
■653 ▼aDISHING▼aEROSION▼aEVALUATIONS▼aTUNGSTEN▼aCMP▼aSLURRY▼aORBITAL▼aPOLISHING▼aSYSTEM
■7001 ▼aKang, Young-Jae
■7001 ▼aPark, Jin-Goo
■7001 ▼aKwon, Pan-Ki
■7001 ▼aKim, Chang-Il
■7001 ▼aOh, Chan-Kwon
■7001 ▼aKim, Soo-Myoung
■7001 ▼aJhon, Myung S.
■7001 ▼aSean Hur
■7001 ▼aKim, Young-Jung
■7001 ▼aKim, Bong-Ho
■773 ▼tTransactions on Electrical and Electronic Materials▼gVol.7, No.4 (2006 August)▼d2007, 08
■■URL ▼ahttp://www.kieeme.or.kr
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