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Consumable approaches of polysilicon MEMS CMP
Consumable approaches of polysilicon MEMS CMP
Detailed Information
- Material Type
- 기사
- ISSN
- 12297607
- Author
- Park, Sungmin
- Title/Author
- Consumable approaches of polysilicon MEMS CMP / Sungmin Park ; by Sukhoon Jeong ; Boumyoung Park ; Haedo Jeong ; Hyoungjae Kim
- Publish Info
- 서울 : 한국전기전자재료학회, 2007.
- Material Info
- pp. 157-162
- Index Term-Uncontrolled
- CONSUMABLE APPROACHES POLYSILICON MEMS CMP
- Added Entry-Personal Name
- Jeong, Sukhoon
- Added Entry-Personal Name
- Park, Boumyoung
- Added Entry-Personal Name
- Jeong, Haedo
- Added Entry-Personal Name
- Kim, Hyoungjae
- Host Item Entry
- Transactions on Electrical and Electronic Materials : Vol.7, No.4 (2006 August) 2007, 08
- Control Number
- kjul:60085879
MARC
008061213s2007 ULKa a ENG■022 ▼a12297607
■1001 ▼aPark, Sungmin
■245 ▼aConsumable approaches of polysilicon MEMS CMP▼dSungmin Park▼eby Sukhoon Jeong▼eBoumyoung Park▼eHaedo Jeong▼eHyoungjae Kim
■260 ▼a서울▼b한국전기전자재료학회▼c2007.
■300 ▼app. 157-162
■653 ▼aCONSUMABLE▼aAPPROACHES▼aPOLYSILICON▼aMEMS▼aCMP
■7001 ▼aJeong, Sukhoon
■7001 ▼aPark, Boumyoung
■7001 ▼aJeong, Haedo
■7001 ▼aKim, Hyoungjae
■773 ▼tTransactions on Electrical and Electronic Materials▼gVol.7, No.4 (2006 August)▼d2007, 08
■■URL ▼ahttp://www.kieeme.or.kr
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