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Fault Detection of Reactive Ion Etching using time series Support Vector Machine
Fault Detection of Reactive Ion Etching using time series Support Vector Machine
Detailed Information
- 자료유형
- 기사
- ISSN
- 17388821
- 서명/저자
- Fault Detection of Reactive Ion Etching using time series Support Vector Machine / 박영국, 한승수, 홍상진 공저
- 발행사항
- 서울 : 한국해양정보통신학회, 2006.
- 형태사항
- pp. 247-250
- 기타저자
- 박영국
- 기타저자
- 한승수
- 기타저자
- 홍상진
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60081703
MARC
008061026s2006 ULKa a KOR■022 ▼a17388821
■245 ▼aFault Detection of Reactive Ion Etching using time series Support Vector Machine▼d박영국, 한승수, 홍상진 공저
■260 ▼a서울▼b한국해양정보통신학회▼c2006.
■300 ▼app. 247-250
■653 ▼aFAULT▼aDETECTION▼aREACTIVE▼aION▼aETCHING▼aUSING▼aSUPPORT▼aVECTOR▼aMACHINE
■7001 ▼a박영국
■7001 ▼a한승수
■7001 ▼a홍상진
■773 ▼t해양정보통신=The Journal of the Korean Institute of Maritime Informati▼g2006년도 춘계종합학술대회▼d2006, 05
■SIS ▼aS035254▼b60077296▼h8▼s2
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