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Tribological Properties of Annealed Diamond-like Carbon Film Synthesized by RF PECVD Method
Tribological Properties of Annealed Diamond-like Carbon Film Synthesized by RF PECVD Method
상세정보
- 자료유형
- 기사
- ISSN
- 12297607
- 서명/저자
- Tribological Properties of Annealed Diamond-like Carbon Film Synthesized by RF PECVD Method / by Won Seok Choi
- 발행사항
- 서울 : 한국전기전자재료학회, 2006.
- 형태사항
- pp. 118-122
- 기타저자
- Won Seok Choi
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60078639
MARC
008060915s2006 ULKa a ENG■022 ▼a12297607
■245 ▼aTribological Properties of Annealed Diamond-like Carbon Film Synthesized by RF PECVD Method▼dby Won Seok Choi
■260 ▼a서울▼b한국전기전자재료학회▼c2006.
■300 ▼app. 118-122
■653 ▼aTRIBOLOGICAL▼aPROPERTIES▼aANNEALED▼aDIAMONDLIKE▼aCARBON▼aFILM▼aSYNTHESIZED▼aRF▼aPECVD▼aMETHOD
■700 ▼aWon Seok Choi
■773 ▼tTransactions on Electrical and Electronic Materials▼gVol.7, No.3 (2006 June)▼d2006, 06
■URL ▼ahttp://kieeme.or.kr
■SIS ▼aS027474▼b60055341▼h8▼s2
