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Effects of Polymer Adsorption on Stabilities and CMP Performance of Ceria Abrasive Particles
Effects of Polymer Adsorption on Stabilities and CMP Performance of Ceria Abrasive Particles
Detailed Information
- Material Type
- 기사
- ISSN
- 12297607
- Title/Author
- Effects of Polymer Adsorption on Stabilities and CMP Performance of Ceria Abrasive Particles / by Norifumi Shimono, Masami Kawaguchi, Naoyuki Koyama
- Publish Info
- 서울 : 한국전기전자재료학회, 2006.
- Material Info
- pp. 112-117
- Index Term-Uncontrolled
- EFFECTS POLYMER ADSORPTION STABILITIES CMP PERFORMANCE CERIA ABRASIVE PARTICLES
- Added Entry-Personal Name
- Norifumi Shimono
- Added Entry-Personal Name
- Masami Kawaguchi
- Added Entry-Personal Name
- Naoyuki Koyama
- Host Item Entry
- Transactions on Electrical and Electronic Materials : Vol.7, No.3 (2006 June) 2006, 06
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60078637
MARC
008060915s2006 ULKa a ENG■022 ▼a12297607
■245 ▼aEffects of Polymer Adsorption on Stabilities and CMP Performance of Ceria Abrasive Particles▼dby Norifumi Shimono, Masami Kawaguchi, Naoyuki Koyama
■260 ▼a서울▼b한국전기전자재료학회▼c2006.
■300 ▼app. 112-117
■653 ▼aEFFECTS▼aPOLYMER▼aADSORPTION▼aSTABILITIES▼aCMP▼aPERFORMANCE▼aCERIA▼aABRASIVE▼aPARTICLES
■700 ▼aNorifumi Shimono
■7001 ▼aMasami Kawaguchi
■7001 ▼aNaoyuki Koyama
■773 ▼tTransactions on Electrical and Electronic Materials▼gVol.7, No.3 (2006 June)▼d2006, 06
■URL ▼ahttp://kieeme.or.kr
■SIS ▼aS027474▼b60055341▼h8▼s2
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