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Advanced Pad Conditioner Design for Exide/Metal CMP
Advanced Pad Conditioner Design for Exide/Metal CMP
Detailed Information
- Material Type
- 기사
- ISSN
- 12297607
- Title/Author
- Advanced Pad Conditioner Design for Exide/Metal CMP / by Taewook Hwang, Gary Baldoni, Anand Tanikella, Thomas Puthanangady
- Publish Info
- 서울 : 한국전기전자재료학회, 2006.
- Material Info
- pp. 62-66
- Index Term-Uncontrolled
- ADVANCED PAD CONDITIONER DESIGN EXIDEMETAL CMP
- Added Entry-Personal Name
- Taewook Hwang
- Added Entry-Personal Name
- Gary Baldoni
- Added Entry-Personal Name
- Anand Tanikella
- Added Entry-Personal Name
- Thomas Puthanangady
- Host Item Entry
- Transactions on Electrical and Electronic Materials : Vol.7, No.2 (2006 April) 2006, 04
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60078619
MARC
008060915s2006 ULKa a ENG■022 ▼a12297607
■245 ▼aAdvanced Pad Conditioner Design for Exide/Metal CMP▼dby Taewook Hwang, Gary Baldoni, Anand Tanikella, Thomas Puthanangady
■260 ▼a서울▼b한국전기전자재료학회▼c2006.
■300 ▼app. 62-66
■653 ▼aADVANCED▼aPAD▼aCONDITIONER▼aDESIGN▼aEXIDEMETAL▼aCMP
■700 ▼aTaewook Hwang
■7001 ▼aGary Baldoni
■7001 ▼aAnand Tanikella
■7001 ▼aThomas Puthanangady
■773 ▼tTransactions on Electrical and Electronic Materials▼gVol.7, No.2 (2006 April)▼d2006, 04
■URL ▼ahttp://kieeme.or.kr
■SIS ▼aS025128▼b60055341▼h8▼s2
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