서브메뉴
검색
Analysis of Process Parameters to Improve On-Chip Linewidth Variation
Analysis of Process Parameters to Improve On-Chip Linewidth Variation
Detailed Information
- Material Type
- 기사
- ISSN
- 15981657
- Title/Author
- Analysis of Process Parameters to Improve On-Chip Linewidth Variation / Yun-Kyeong Jang, Doo-Youl Lee, Sung-Woo Lee
- Publish Info
- 서울 : 대한전자공학회, 2004.
- Material Info
- pp. 100-105
- Added Entry-Personal Name
- Yun-Kyeong Jang, Doo-Youl Lee, Sung-Woo Lee
- Host Item Entry
- Journal of Semiconductor Technology and Science : Volume 4, Number 2, (2004 June) 2004, 06
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60076441
MARC
008060529s2004 ULKa a ENG■022 ▼a15981657
■245 ▼aAnalysis of Process Parameters to Improve On-Chip Linewidth Variation▼dYun-Kyeong Jang, Doo-Youl Lee, Sung-Woo Lee
■260 ▼a서울▼b대한전자공학회▼c2004.
■300 ▼app. 100-105
■653 ▼aANALYSIS▼aPROCESS▼aPARAMETERS▼aIMPROVE▼aONCHIP▼aLINEWIDTH▼aVARIATION
■700 ▼aYun-Kyeong Jang, Doo-Youl Lee, Sung-Woo Lee
■773 ▼tJournal of Semiconductor Technology and Science▼gVolume 4, Number 2, (2004 June)▼d2004, 06
■URL ▼ahttp://www.jsts.org
■SIS ▼aS013702▼b60054120▼h8▼s2
Preview
Export
ChatGPT Discussion
AI Recommended Related Books
Detail Info.
- Reservation
- Not Exist
- My Folder
- Reference Materials for Thesis Writing
- Reference Materials for Research Ethics
- Job-Related Books
