MARC

 008060529s2004        ULKa    a                          ENG
■022    ▼a15981657
■245    ▼aAnalysis  of  Process  Parameters  to  Improve  On-Chip  Linewidth  Variation▼dYun-Kyeong  Jang,  Doo-Youl  Lee,  Sung-Woo  Lee
■260    ▼a서울▼b대한전자공학회▼c2004.
■300    ▼app.  100-105
■653    ▼aANALYSIS▼aPROCESS▼aPARAMETERS▼aIMPROVE▼aONCHIP▼aLINEWIDTH▼aVARIATION
■700    ▼aYun-Kyeong  Jang,  Doo-Youl  Lee,  Sung-Woo  Lee
■773    ▼tJournal  of  Semiconductor  Technology  and  Science▼gVolume  4,  Number  2,  (2004  June)▼d2004,  06
■URL    ▼ahttp://www.jsts.org
■SIS    ▼aS013702▼b60054120▼h8▼s2

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