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Design and Fabrication of a Micro PZT Cantilever Array Actuator for Applications in Fluidic Systems
Design and Fabrication of a Micro PZT Cantilever Array Actuator for Applications in Fluidic Systems
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008060522s2005 ULKa a ENG■022 ▼a1738494X
■245 ▼aDesign and Fabrication of a Micro PZT Cantilever Array Actuator for Applications in Fluidic Systems▼dHyonse Kim, Chihyun In. Gilho Yoon, Jongwon Kim
■260 ▼a서울▼b대한기계학회▼c2005.
■300 ▼app. 1544-1553
■653 ▼aDESIGN▼aFABRICATION▼aMICRO▼aPZT▼aCANTILEVER▼aARRAY▼aACTUATOR▼aAPPLICATIONS▼aFLUIDIC▼aSYSTEMS
■700 ▼aHyonse Kim, Chihyun In. Gilho Yoon, Jongwon Kim
■773 ▼tJournal of Mechanical Science and Technology▼gVol. 19 (No. 8)▼d2005, 08
■URL ▼ahttp://www.ksme.or.kr
■SIS ▼aS017623▼b60064619▼h8▼s2
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