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Prediction of Residual Stress Distribution in Multi-Stacked Thin Film by Curvature Measurement and Iterative FEA
Prediction of Residual Stress Distribution in Multi-Stacked Thin Film by Curvature Measurement and Iterative FEA
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MARC
008060516s2005 ULKa a ENG■022 ▼a1738494X
■245 ▼aPrediction of Residual Stress Distribution in Multi-Stacked Thin Film by Curvature Measurement and Iterative FEA▼dHyeon Chang Choi, Jun-Hyub Park
■260 ▼a서울▼b대한기계학회▼c2005.
■300 ▼app. 1065-1071
■653 ▼aPREDICTION▼aRESIDUAL▼aSTRESS▼aDISTRIBUTION▼aMULTISTACKED▼aFILM▼aCURVATURE▼aMEASUREMENT▼aITERATIVE▼aFEA
■700 ▼aHyeon Chang Choi, Jun-Hyub Park
■773 ▼tJournal of Mechanical Science and Technology▼gVol. 19 (No. 5)▼d2005, 05
■URL ▼ahttp://www.ksme.or.kr
■SIS ▼aS017620▼b60064619▼h8▼s2
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