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Prediction of Residual Stress Distribution in Multi-Stacked Thin Film by Curvature Measurement and Iterative FEA
Prediction of Residual Stress Distribution in Multi-Stacked Thin Film by Curvature Measure...
Prediction of Residual Stress Distribution in Multi-Stacked Thin Film by Curvature Measurement and Iterative FEA

Detailed Information

자료유형  
 기사
ISSN  
1738494X
서명/저자  
Prediction of Residual Stress Distribution in Multi-Stacked Thin Film by Curvature Measurement and Iterative FEA / Hyeon Chang Choi, Jun-Hyub Park
발행사항  
서울 : 대한기계학회, 2005.
형태사항  
pp. 1065-1071
키워드  
PREDICTION RESIDUAL STRESS DISTRIBUTION MULTISTACKED FILM CURVATURE MEASUREMENT ITERATIVE FEA
기타저자  
Hyeon Chang Choi, Jun-Hyub Park
기본자료저록  
Journal of Mechanical Science and Technology : Vol. 19 (No. 5) 2005, 05
URL  
http://www.ksme.or.kr
모체레코드  
모체정보확인
Control Number  
kjul:60075902

MARC

 008060516s2005        ULKa    a                          ENG
■022    ▼a1738494X
■245    ▼aPrediction  of  Residual  Stress  Distribution  in  Multi-Stacked  Thin  Film  by  Curvature  Measurement  and  Iterative  FEA▼dHyeon  Chang  Choi,    Jun-Hyub  Park
■260    ▼a서울▼b대한기계학회▼c2005.
■300    ▼app.  1065-1071
■653    ▼aPREDICTION▼aRESIDUAL▼aSTRESS▼aDISTRIBUTION▼aMULTISTACKED▼aFILM▼aCURVATURE▼aMEASUREMENT▼aITERATIVE▼aFEA
■700    ▼aHyeon  Chang  Choi,    Jun-Hyub  Park
■773    ▼tJournal  of  Mechanical  Science  and  Technology▼gVol.  19  (No.  5)▼d2005,  05
■URL    ▼ahttp://www.ksme.or.kr
■SIS    ▼aS017620▼b60064619▼h8▼s2

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