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Adhesion Enhancement of Thin Film Metals Polyimide Substrates by Bias Sputtering
Adhesion Enhancement of Thin Film Metals Polyimide Substrates by Bias Sputtering / 김선영,...
Adhesion Enhancement of Thin Film Metals Polyimide Substrates by Bias Sputtering

Detailed Information

자료유형  
 기사
ISSN  
12269360
서명/저자  
Adhesion Enhancement of Thin Film Metals Polyimide Substrates by Bias Sputtering / 김선영, 조성수, 강정수, 김영호 공저
발행사항  
서울 : 한국마이크로전자및 패키징학회, 2005.
형태사항  
pp. 207-212
키워드  
ADHESION ENHANCEMENT FILM METALS POLYIMIDE SUBSTRATES BIAS SPUTTERING
기타저자  
김선영, 조성수, 강정수, 김영호
기본자료저록  
마이크로전자 및 패키징 학회지=Journal of the Microelectronics and Pack : 2005 Vol. 12 No.3 ((36)) 2005, 09
URL  
http://www.imapsk.or.kr
모체레코드  
모체정보확인
Control Number  
kjul:60075312

MARC

 008060503s2005        ULKa    a                          KOR
■022    ▼a12269360
■245    ▼aAdhesion  Enhancement  of  Thin  Film  Metals  Polyimide  Substrates  by  Bias  Sputtering▼d김선영,  조성수,  강정수,  김영호  공저
■260    ▼a서울▼b한국마이크로전자및  패키징학회▼c2005.
■300    ▼app.  207-212
■653    ▼aADHESION▼aENHANCEMENT▼aFILM▼aMETALS▼aPOLYIMIDE▼aSUBSTRATES▼aBIAS▼aSPUTTERING
■700    ▼a김선영,  조성수,  강정수,  김영호
■773    ▼t마이크로전자  및  패키징  학회지=Journal  of  the  Microelectronics  and  Pack▼g2005  Vol.  12  No.3  ((36))▼d2005,  09
■URL    ▼ahttp://www.imapsk.or.kr
■SIS    ▼aS023546▼b60075252▼h8▼s2

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