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Numerical Study on the Low Density Gas Flows in a Plasma Etch Reactor
Numerical Study on the Low Density Gas Flows in a Plasma Etch Reactor / Joong-Sik Heo, You...
Numerical Study on the Low Density Gas Flows in a Plasma Etch Reactor

Detailed Information

자료유형  
 기사
ISSN  
1738494X
서명/저자  
Numerical Study on the Low Density Gas Flows in a Plasma Etch Reactor / Joong-Sik Heo, Young-Kyu Hwang
발행사항  
서울 : 대한기계학회, 2005.
형태사항  
pp. 181-188
키워드  
NUMERICAL STUDY DENSITY GAS FLOWS PLASMA ETCH REACTOR
기타저자  
Joong-Sik Heo, Young-Kyu Hwang
기본자료저록  
Journal of Mechanical Science and Technology : Vol. 19 (No. 1) 2005, 01
URL  
http://www.ksme.or.kr
모체레코드  
모체정보확인
Control Number  
kjul:60074427

MARC

 008060421s2005        ULKa    a                          ENG
■022    ▼a1738494X
■245    ▼aNumerical  Study  on  the  Low  Density  Gas  Flows  in  a  Plasma  Etch  Reactor▼dJoong-Sik  Heo,  Young-Kyu  Hwang
■260    ▼a서울▼b대한기계학회▼c2005.
■300    ▼app.  181-188
■653    ▼aNUMERICAL▼aSTUDY▼aDENSITY▼aGAS▼aFLOWS▼aPLASMA▼aETCH▼aREACTOR
■700    ▼aJoong-Sik  Heo,  Young-Kyu  Hwang
■773    ▼tJournal  of  Mechanical  Science  and  Technology▼gVol.  19  (No.  1)▼d2005,  01
■URL    ▼ahttp://www.ksme.or.kr
■SIS    ▼aS017616▼b60064619▼h8▼s2

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