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Numerical Study on the Low Density Gas Flows in a Plasma Etch Reactor
Numerical Study on the Low Density Gas Flows in a Plasma Etch Reactor
Detailed Information
- Material Type
- 기사
- ISSN
- 1738494X
- Title/Author
- Numerical Study on the Low Density Gas Flows in a Plasma Etch Reactor / Joong-Sik Heo, Young-Kyu Hwang
- Publish Info
- 서울 : 대한기계학회, 2005.
- Material Info
- pp. 181-188
- Added Entry-Personal Name
- Joong-Sik Heo, Young-Kyu Hwang
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60074427
MARC
008060421s2005 ULKa a ENG■022 ▼a1738494X
■245 ▼aNumerical Study on the Low Density Gas Flows in a Plasma Etch Reactor▼dJoong-Sik Heo, Young-Kyu Hwang
■260 ▼a서울▼b대한기계학회▼c2005.
■300 ▼app. 181-188
■653 ▼aNUMERICAL▼aSTUDY▼aDENSITY▼aGAS▼aFLOWS▼aPLASMA▼aETCH▼aREACTOR
■700 ▼aJoong-Sik Heo, Young-Kyu Hwang
■773 ▼tJournal of Mechanical Science and Technology▼gVol. 19 (No. 1)▼d2005, 01
■URL ▼ahttp://www.ksme.or.kr
■SIS ▼aS017616▼b60064619▼h8▼s2
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