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Optimal Calibration for Rotating Analyzer Ellipsometer
Optimal Calibration for Rotating Analyzer Ellipsometer
Detailed Information
- Material Type
- 기사
- ISSN
- 1738494X
- Title/Author
- Optimal Calibration for Rotating Analyzer Ellipsometer / Suglim Park, DaeGab Gweon
- Publish Info
- 서울 : 대한기계학회, 2005.
- Material Info
- pp. 2165-2171
- Index Term-Uncontrolled
- OPTIMAL CALIBRATION ROTATING ANALYZER ELLIPSOMETER
- Added Entry-Personal Name
- Suglim Park, DaeGab Gweon
- Host Item Entry
- Journal of Mechanical Science and Technology : Vol. 19 (No. 11)special edition 2005, 11
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60074290
MARC
008060419s2005 ULKa a ENG■022 ▼a1738494X
■245 ▼aOptimal Calibration for Rotating Analyzer Ellipsometer▼dSuglim Park, DaeGab Gweon
■260 ▼a서울▼b대한기계학회▼c2005.
■300 ▼app. 2165-2171
■653 ▼aOPTIMAL▼aCALIBRATION▼aROTATING▼aANALYZER▼aELLIPSOMETER
■700 ▼aSuglim Park, DaeGab Gweon
■773 ▼tJournal of Mechanical Science and Technology▼gVol. 19 (No. 11)special edition▼d2005, 11
■URL ▼ahttp://www.ksme.or.kr
■SIS ▼aS017627▼b60064619▼h8▼s2
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