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Optimal Calibration for Rotating Analyzer Ellipsometer
Optimal Calibration for Rotating Analyzer Ellipsometer / Suglim Park, DaeGab Gweon
Optimal Calibration for Rotating Analyzer Ellipsometer

Detailed Information

자료유형  
 기사
ISSN  
1738494X
서명/저자  
Optimal Calibration for Rotating Analyzer Ellipsometer / Suglim Park, DaeGab Gweon
발행사항  
서울 : 대한기계학회, 2005.
형태사항  
pp. 2165-2171
키워드  
OPTIMAL CALIBRATION ROTATING ANALYZER ELLIPSOMETER
기타저자  
Suglim Park, DaeGab Gweon
기본자료저록  
Journal of Mechanical Science and Technology : Vol. 19 (No. 11)special edition 2005, 11
URL  
http://www.ksme.or.kr
모체레코드  
모체정보확인
Control Number  
kjul:60074290

MARC

 008060419s2005        ULKa    a                          ENG
■022    ▼a1738494X
■245    ▼aOptimal  Calibration  for  Rotating  Analyzer  Ellipsometer▼dSuglim  Park,  DaeGab  Gweon
■260    ▼a서울▼b대한기계학회▼c2005.
■300    ▼app.  2165-2171
■653    ▼aOPTIMAL▼aCALIBRATION▼aROTATING▼aANALYZER▼aELLIPSOMETER
■700    ▼aSuglim  Park,  DaeGab  Gweon
■773    ▼tJournal  of  Mechanical  Science  and  Technology▼gVol.  19  (No.  11)special  edition▼d2005,  11
■URL    ▼ahttp://www.ksme.or.kr
■SIS    ▼aS017627▼b60064619▼h8▼s2

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