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A Study on the Fabrication of Micro Groove on Si Wafer using Chemical Mechanical Machining
A Study on the Fabrication of Micro Groove on Si Wafer using Chemical Mechanical Machining...
A Study on the Fabrication of Micro Groove on Si Wafer using Chemical Mechanical Machining

Detailed Information

자료유형  
 기사
ISSN  
1738494X
서명/저자  
A Study on the Fabrication of Micro Groove on Si Wafer using Chemical Mechanical Machining / Junmin Park, Haedo Jeong
발행사항  
서울 : 대한기계학회, 2005.
형태사항  
pp. 2096-2104
키워드  
STUDY FABRICATION MICRO GROOVE WAFER USING CHEMICAL MECHANICAL MACHINING
기타저자  
Junmin Park, Haedo Jeong
기본자료저록  
Journal of Mechanical Science and Technology : Vol. 19 (No. 11)special edition 2005, 11
URL  
http://www.ksme.or.kr
모체레코드  
모체정보확인
Control Number  
kjul:60074273

MARC

 008060419s2005        ULKa    a                          ENG
■022    ▼a1738494X
■245    ▼aA  Study  on  the  Fabrication  of  Micro  Groove  on  Si  Wafer  using  Chemical  Mechanical  Machining▼dJunmin  Park,  Haedo  Jeong
■260    ▼a서울▼b대한기계학회▼c2005.
■300    ▼app.  2096-2104
■653    ▼aSTUDY▼aFABRICATION▼aMICRO▼aGROOVE▼aWAFER▼aUSING▼aCHEMICAL▼aMECHANICAL▼aMACHINING
■700    ▼aJunmin  Park,  Haedo  Jeong
■773    ▼tJournal  of  Mechanical  Science  and  Technology▼gVol.  19  (No.  11)special  edition▼d2005,  11
■URL    ▼ahttp://www.ksme.or.kr
■SIS    ▼aS017627▼b60064619▼h8▼s2

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