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A Study on the Fabrication of Micro Groove on Si Wafer using Chemical Mechanical Machining
A Study on the Fabrication of Micro Groove on Si Wafer using Chemical Mechanical Machining
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MARC
008060419s2005 ULKa a ENG■022 ▼a1738494X
■245 ▼aA Study on the Fabrication of Micro Groove on Si Wafer using Chemical Mechanical Machining▼dJunmin Park, Haedo Jeong
■260 ▼a서울▼b대한기계학회▼c2005.
■300 ▼app. 2096-2104
■653 ▼aSTUDY▼aFABRICATION▼aMICRO▼aGROOVE▼aWAFER▼aUSING▼aCHEMICAL▼aMECHANICAL▼aMACHINING
■700 ▼aJunmin Park, Haedo Jeong
■773 ▼tJournal of Mechanical Science and Technology▼gVol. 19 (No. 11)special edition▼d2005, 11
■URL ▼ahttp://www.ksme.or.kr
■SIS ▼aS017627▼b60064619▼h8▼s2
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