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Improvement of Rounding Effect in Chemical Mechanical Polishing Process for Nano-Scale Manufacturing
Improvement of Rounding Effect in Chemical Mechanical Polishing Process for Nano-Scale Manufacturing
Detailed Information
- 자료유형
- 기사
- ISSN
- 1738494X
- 서명/저자
- Improvement of Rounding Effect in Chemical Mechanical Polishing Process for Nano-Scale Manufacturing / Tae Woo Lim, Sang Hu Park, Dong-Yol Yang, Shin Wook Yi, Hong Jin Kong, Kwang-Sup Lee
- 발행사항
- 서울 : 대한기계학회, 2005.
- 형태사항
- pp. 2091-2095
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60074272
MARC
008060419s2005 ULKa a ENG■022 ▼a1738494X
■245 ▼aImprovement of Rounding Effect in Chemical Mechanical Polishing Process for Nano-Scale Manufacturing▼dTae Woo Lim, Sang Hu Park, Dong-Yol Yang, Shin Wook Yi, Hong Jin Kong, Kwang-Sup Lee
■260 ▼a서울▼b대한기계학회▼c2005.
■300 ▼app. 2091-2095
■653 ▼aIMPROVEMENT▼aROUNDING▼aEFFECT▼aCHEMICAL▼aMECHANICAL▼aPOLISHING▼aPROCESS▼aNANOSCALE▼aMANUFACTURING
■700 ▼aTae Woo Lim, Sang Hu Park, Dong-Yol Yang, Shin Wook Yi, Hong Jin Kong, Kwang-Sup Lee
■773 ▼tJournal of Mechanical Science and Technology▼gVol. 19 (No. 11)special edition▼d2005, 11
■URL ▼ahttp://www.ksme.or.kr
■SIS ▼aS017627▼b60064619▼h8▼s2
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