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Motion Error Compensation Method for Hydrostatic Tables Using Actively Controlled Capillaries
Motion Error Compensation Method for Hydrostatic Tables Using Actively Controlled Capillaries
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MARC
008060419s2006 ULKa a ENG■022 ▼a1738494X
■245 ▼aMotion Error Compensation Method for Hydrostatic Tables Using Actively Controlled Capillaries▼dChun Hong Park, Yoon Jin Oh, Joo Ho Hwang, Deug Woo Lee
■260 ▼a서울▼b대한기계학회▼c2006.
■300 ▼app. 51-58
■653 ▼aMOTION▼aERROR▼aCOMPENSATION▼aMETHOD▼aHYDROSTATIC▼aTABLES▼aUSING▼aACTIVELY▼aCONTROLLED▼aCAPILLARIES
■700 ▼aChun Hong Park, Yoon Jin Oh, Joo Ho Hwang, Deug Woo Lee
■773 ▼tJournal of Mechanical Science and Technology▼gVol. 20 (No. 1)▼d2006, 01
■URL ▼ahttp://www.ksme.or.kr
■SIS ▼aS018466▼b60064619▼h8▼s2
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