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Numerical Analysis for the Dynamics of the Oxidation-Induced Stacking Fault in Czochraski-Grown Silicon Crystals
Numerical Analysis for the Dynamics of the Oxidation-Induced Stacking Fault in Czochraski-Grown Silicon Crystals
상세정보
- 자료유형
- 기사
- ISSN
- 02561115
- 서명/저자
- Numerical Analysis for the Dynamics of the Oxidation-Induced Stacking Fault in Czochraski-Grown Silicon Crystals / Jong-Hoe Wang, Hyun Jung Oh, Hak Do Yoo
- 발행사항
- 서울 : 한국화학공학회, 2001.
- 형태사항
- pp. 81-87
- 기본자료저록
- The KOREAN International Journal of Chemical Engineering : Vol. 18 No. 1 (2001 January) 2001, 01
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60071230
MARC
008060215s2001 ULKa a ENG■022 ▼a02561115
■245 ▼aNumerical Analysis for the Dynamics of the Oxidation-Induced Stacking Fault in Czochraski-Grown Silicon Crystals▼dJong-Hoe Wang, Hyun Jung Oh, Hak Do Yoo
■260 ▼a서울▼b한국화학공학회▼c2001.
■300 ▼app. 81-87
■653 ▼aNUMERICAL▼aANALYSIS▼aDYNAMICS▼aOXIDATIONINDUCED▼aSTACKING▼aFAULT▼aCZOCHRASKIGROWN▼aSILICON▼aCRYSTALS
■700 ▼aJong-Hoe Wang, Hyun Jung Oh, Hak Do Yoo
■773 ▼tThe KOREAN International Journal of Chemical Engineering▼gVol. 18 No. 1 (2001 January)▼d2001, 01
■SIS ▼aS018103▼b60066239▼h8▼s2
