서브메뉴
검색
Preparations of Silica Slurry for Wafer Polishing via Controlled Growth of Commercial Silica Seeds
Preparations of Silica Slurry for Wafer Polishing via Controlled Growth of Commercial Silica Seeds
Detailed Information
- Material Type
- 기사
- ISSN
- 02561115
- Title/Author
- Preparations of Silica Slurry for Wafer Polishing via Controlled Growth of Commercial Silica Seeds / Jae-Hyun So, Sun Hyuk Bae Seung-Man Yang, Do Hyun Kim
- Publish Info
- 서울 : 한국화학공학회, 2001.
- Material Info
- pp. 547-554
- Index Term-Uncontrolled
- PREPARATIONS SILICA SLURRY WAFER POLISHING VIA CONTROLLED GROWTH COMMERCIAL SEEDS
- Added Entry-Personal Name
- Jae-Hyun So, Sun Hyuk Bae Seung-Man Yang, Do Hyun Kim
- Host Item Entry
- The KOREAN International Journal of Chemical Engineering : Vol. 18 No. 4 (2001 July) 2001, 07
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60070971
MARC
008060215s2001 ULKa a ENG■022 ▼a02561115
■245 ▼aPreparations of Silica Slurry for Wafer Polishing via Controlled Growth of Commercial Silica Seeds▼dJae-Hyun So, Sun Hyuk Bae Seung-Man Yang, Do Hyun Kim
■260 ▼a서울▼b한국화학공학회▼c2001.
■300 ▼app. 547-554
■653 ▼aPREPARATIONS▼aSILICA▼aSLURRY▼aWAFER▼aPOLISHING▼aVIA▼aCONTROLLED▼aGROWTH▼aCOMMERCIAL▼aSEEDS
■700 ▼aJae-Hyun So, Sun Hyuk Bae Seung-Man Yang, Do Hyun Kim
■773 ▼tThe KOREAN International Journal of Chemical Engineering▼gVol. 18 No. 4 (2001 July)▼d2001, 07
■SIS ▼aS018106▼b60066239▼h8▼s2
Preview
Export
ChatGPT Discussion
AI Recommended Related Books
Detail Info.
- Reservation
- Not Exist
- My Folder
- Reference Materials for Thesis Writing
- Reference Materials for Research Ethics
- Job-Related Books


