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Preparations of Silica Slurry for Wafer Polishing via Controlled Growth of Commercial Silica Seeds
Preparations of Silica Slurry for Wafer Polishing via Controlled Growth of Commercial Silica Seeds
Detailed Information
- Material Type
- 기사
- ISSN
- 02561115
- Title/Author
- Preparations of Silica Slurry for Wafer Polishing via Controlled Growth of Commercial Silica Seeds / Jae-Hyun So, Sun Hyuk Bae Seung-Man Yang, Do Hyun Kim
- Publish Info
- 서울 : 한국화학공학회, 2001.
- Material Info
- pp. 547-554
- Index Term-Uncontrolled
- PREPARATIONS SILICA SLURRY WAFER POLISHING VIA CONTROLLED GROWTH COMMERCIAL SEEDS
- Added Entry-Personal Name
- Jae-Hyun So, Sun Hyuk Bae Seung-Man Yang, Do Hyun Kim
- Host Item Entry
- The KOREAN International Journal of Chemical Engineering : Vol. 18 No. 4 (2001 July) 2001, 07
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60070971
MARC
008060215s2001 ULKa a ENG■022 ▼a02561115
■245 ▼aPreparations of Silica Slurry for Wafer Polishing via Controlled Growth of Commercial Silica Seeds▼dJae-Hyun So, Sun Hyuk Bae Seung-Man Yang, Do Hyun Kim
■260 ▼a서울▼b한국화학공학회▼c2001.
■300 ▼app. 547-554
■653 ▼aPREPARATIONS▼aSILICA▼aSLURRY▼aWAFER▼aPOLISHING▼aVIA▼aCONTROLLED▼aGROWTH▼aCOMMERCIAL▼aSEEDS
■700 ▼aJae-Hyun So, Sun Hyuk Bae Seung-Man Yang, Do Hyun Kim
■773 ▼tThe KOREAN International Journal of Chemical Engineering▼gVol. 18 No. 4 (2001 July)▼d2001, 07
■SIS ▼aS018106▼b60066239▼h8▼s2
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