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Prediction of Etch Profile Uniformity Using Wavelet and Neural Network
Prediction of Etch Profile Uniformity Using Wavelet and Neural Network
Detailed Information
- Material Type
- 기사
- ISSN
- 15986446
- Title/Author
- Prediction of Etch Profile Uniformity Using Wavelet and Neural Network / Won Sun Choi, Myo Taeg Lim, Byungwhan Kim
- Publish Info
- 서울 : The Korean Institute of Electrical Eng., 2004.
- Material Info
- pp. 256
- Index Term-Uncontrolled
- PREDICTION ETCH PROFILE UNIFORMITY USING WAVELET NEURAL NETWORK
- Added Entry-Personal Name
- Won Sun Choi, Myo Taeg Lim, Byungwhan Kim
- Host Item Entry
- International Journal of Control, Automation, and System : Vol. 2 No. 2 (2004 June) 2004, 06
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60069455
MARC
008060210s2004 ULKa a ENG■022 ▼a15986446
■245 ▼aPrediction of Etch Profile Uniformity Using Wavelet and Neural Network▼dWon Sun Choi, Myo Taeg Lim, Byungwhan Kim
■260 ▼a서울▼bThe Korean Institute of Electrical Eng.▼c2004.
■300 ▼app. 256
■653 ▼aPREDICTION▼aETCH▼aPROFILE▼aUNIFORMITY▼aUSING▼aWAVELET▼aNEURAL▼aNETWORK
■700 ▼aWon Sun Choi, Myo Taeg Lim, Byungwhan Kim
■773 ▼tInternational Journal of Control, Automation, and System▼gVol. 2 No. 2 (2004 June)▼d2004, 06
■SIS ▼aS018362▼b60067606▼h8▼s2
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