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Composition Determination of Si/Sil-xGex/Si by Photoreflectance Spectroscopy
Composition Determination of Si/Sil-xGex/Si by Photoreflectance Spectroscopy
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008050913s2004 ULKa a ENG■022 ▼a12259438
■245 ▼aComposition Determination of Si/Sil-xGex/Si by Photoreflectance Spectroscopy▼d공저 Changchun Chen, P.V. Kelly, Zhihong Liu
■260 ▼a서울▼b대한금속.재료학회▼c2004.
■300 ▼app. 489-492
■653 ▼aCOMPOSITION▼aDETERMINATION▼aSISILXGEXSI▼aPHOTOREFLECTANCE▼aSPECTROSCOPY
■700 ▼aChangchun Chen, P.V. Kelly, Zhihong Liu
■773 ▼tMetals and Materials▼gVOL.10 NO.5 (2004 OCTOBER)▼d2004, 10
■SIS ▼aS010856▼b60013551▼h1▼s2▼fP
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