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ICP(Inductively Coupled Plasma)처리에 따른 n-type SiGe/Metal contact의 SBH(Schottky Barrier Height) 연구
ICP(Inductively Coupled Plasma)처리에 따른 n-type SiGe/Metal contact의 SBH(Schottky Barrier Height) 연구
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MARC
008050811s2005 ULKa a KOR■022 ▼a02533847
■245 ▼aICP(Inductively Coupled Plasma)처리에 따른 n-type SiGe/Metal contact의 SBH(Schottky Barrier Height) 연구▼d김이곤, 장호원, 전창민, 송영주, 강진영 공저
■260 ▼a서울▼b대한금속.재료학회▼c2005.
■300 ▼app. 132
■653 ▼aICPINDUCTIVELY▼aCOUPLED▼aPLASMA처리에▼aNTYPE▼aSIGEMETAL▼aCONTACT의▼aSBHSCHOTTKY▼aBARRIER▼aHEIGHT
■700 ▼a김이곤, 장호원, 전창민, 송영주, 강진영
■773 ▼t대한금속.재료학회지▼gVol.43 No.2 (2005년 2월)▼d2005, 02
■SIS ▼aS010984▼b60013425▼h8▼s2
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