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The science and engineering of microelectronic fabrication
The science and engineering of microelectronic fabrication
상세정보
- 자료유형
- 단행본
- ISBN
- 0195105087
- 청구기호
- 569 C191s
- 서명/저자
- The science and engineering of microelectronic fabrication / Stephen A. Campbell.
- 발행사항
- New York : Oxford University Press, 1996.
- 형태사항
- xv, 536 p. : ill. ; 25 cm.
- 총서명
- Oxford series in electrical engineering
- 서지주기
- Includes bibliographical references and index.
- 가격
- 25000
- Control Number
- kjul:60046581
MARC
008050729s1996 nyua b 001 0 eng■020 ▼a0195105087
■035 ▼aKRIC00284686
■090 ▼a569▼bC191s
■1001 ▼aCampbell, Stephen A.
■24510▼aThe science and engineering of microelectronic fabrication▼dStephen A. Campbell.
■260 ▼aNew York▼bOxford University Press▼c1996.
■300 ▼axv, 536 p.▼bill.▼c25 cm.
■44000▼aOxford series in electrical engineering
■504 ▼aIncludes bibliographical references and index.
■650 0▼aSemiconductors▼xDesign and construction
■9500 ▼b25000
