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Implementation of a Piezoresistive MEMS Cantilever for Nanoscale Force Measurement in Micro/Nano Robotic Applications
Implementation of a Piezoresistive MEMS Cantilever for Nanoscale Force Measurement in Micro/Nano Robotic Applications
Detailed Information
- 자료유형
- 기사
- ISSN
- 12264865
- 서명/저자
- Implementation of a Piezoresistive MEMS Cantilever for Nanoscale Force Measurement in Micro/Nano Robotic Applications / 공저 Deok-Ho Kim, Byungkyu Kim, Jong-Oh Park
- 발행사항
- 서울 : 대한기계학회, 2004.
- 형태사항
- pp. 789
- 키워드
- IMPLEMENTATION PIEZORESISTIVE MEMS CANTILEVER NANOSCALE FORCE MEASUREMENT MICRONANO ROBOTIC APPLICATIONS
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60046258
MARC
008050728s2004 ULKa a ENG■022 ▼a12264865
■245 ▼aImplementation of a Piezoresistive MEMS Cantilever for Nanoscale Force Measurement in Micro/Nano Robotic Applications▼d공저 Deok-Ho Kim, Byungkyu Kim, Jong-Oh Park
■260 ▼a서울▼b대한기계학회▼c2004.
■300 ▼app. 789
■653 ▼aIMPLEMENTATION▼aPIEZORESISTIVE▼aMEMS▼aCANTILEVER▼aNANOSCALE▼aFORCE▼aMEASUREMENT▼aMICRONANO▼aROBOTIC▼aAPPLICATIONS
■700 ▼aDeok-Ho Kim, Byungkyu Kim, Jong-Oh Park
■773 ▼tKSME International Journal▼gVol.18 No.5 (2004 May)▼d2004, 05
■SIS ▼aS010614▼b60013846▼h8▼s2
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