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Leakage Currents in Ti-O/Ta2O5 Thin Film Deposited on Ta/TI/Al2O3
Leakage Currents in Ti-O/Ta2O5 Thin Film Deposited on Ta/TI/Al2O3 / Hyun-Ju Kim,Jae-Sung S...
Leakage Currents in Ti-O/Ta2O5 Thin Film Deposited on Ta/TI/Al2O3

Detailed Information

자료유형  
 기사
ISSN  
12259438
서명/저자  
Leakage Currents in Ti-O/Ta2O5 Thin Film Deposited on Ta/TI/Al2O3 / Hyun-Ju Kim,Jae-Sung Song,In-Sung Kim,Sang-Su Kim
발행사항  
서울 : 대한금속.재료학회, 2003.
형태사항  
pp. 485-488
키워드  
LEAKAGE CURRENTS TIOTA2O5 FILM DEPOSITED TATIAL2O3
기타저자  
Hyun-Ju Kim,Jae-Sung Song,In-Sung Kim,Sang-Su Kim
기본자료저록  
Metals and Materials : VOL.9 NO.5 (2003 OCTOBER) 2003, 10
모체레코드  
모체정보확인
Control Number  
kjul:60027170

MARC

 008031022s2003        ULKa    a                          ENG
■022    ▼a12259438
■245    ▼aLeakage  Currents  in  Ti-O/Ta2O5  Thin  Film  Deposited  on  Ta/TI/Al2O3▼dHyun-Ju  Kim,Jae-Sung  Song,In-Sung  Kim,Sang-Su  Kim
■260    ▼a서울▼b대한금속.재료학회▼c2003.
■300    ▼app.  485-488
■653    ▼aLEAKAGE▼aCURRENTS▼aTIOTA2O5▼aFILM▼aDEPOSITED▼aTATIAL2O3
■700    ▼aHyun-Ju  Kim,Jae-Sung  Song,In-Sung  Kim,Sang-Su  Kim
■773    ▼tMetals  and  Materials▼gVOL.9  NO.5  (2003  OCTOBER)▼d2003,  10
■SIS    ▼aS010463▼b60013551▼h8▼s2

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