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Leakage Currents in Ti-O/Ta2O5 Thin Film Deposited on Ta/TI/Al2O3
Leakage Currents in Ti-O/Ta2O5 Thin Film Deposited on Ta/TI/Al2O3
Detailed Information
- Material Type
- 기사
- ISSN
- 12259438
- Title/Author
- Leakage Currents in Ti-O/Ta2O5 Thin Film Deposited on Ta/TI/Al2O3 / Hyun-Ju Kim,Jae-Sung Song,In-Sung Kim,Sang-Su Kim
- Publish Info
- 서울 : 대한금속.재료학회, 2003.
- Material Info
- pp. 485-488
- Added Entry-Personal Name
- Hyun-Ju Kim,Jae-Sung Song,In-Sung Kim,Sang-Su Kim
- Host Item Entry
- Metals and Materials : VOL.9 NO.5 (2003 OCTOBER) 2003, 10
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60027170
MARC
008031022s2003 ULKa a ENG■022 ▼a12259438
■245 ▼aLeakage Currents in Ti-O/Ta2O5 Thin Film Deposited on Ta/TI/Al2O3▼dHyun-Ju Kim,Jae-Sung Song,In-Sung Kim,Sang-Su Kim
■260 ▼a서울▼b대한금속.재료학회▼c2003.
■300 ▼app. 485-488
■653 ▼aLEAKAGE▼aCURRENTS▼aTIOTA2O5▼aFILM▼aDEPOSITED▼aTATIAL2O3
■700 ▼aHyun-Ju Kim,Jae-Sung Song,In-Sung Kim,Sang-Su Kim
■773 ▼tMetals and Materials▼gVOL.9 NO.5 (2003 OCTOBER)▼d2003, 10
■SIS ▼aS010463▼b60013551▼h8▼s2
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