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Growth and Characterizationof Al₂O₃Thin Films for the Buffer Insulator in Pt/SrBi₂Nb₂O0/Al₂O₃/Si Ferroelectric Gate Oxide Structure
Growth and Characterizationof Al₂O₃Thin Films for the Buffer Insulator in Pt/SrBi₂Nb₂O0/Al₂O₃/Si Ferroelectric Gate Oxide Structure
Detailed Information
- 자료유형
- 기사
- ISSN
- 12259438
- 서명/저자
- Growth and Characterizationof Al₂O₃Thin Films for the Buffer Insulator in Pt/SrBi₂Nb₂O0/Al₂O₃/Si Ferroelectric Gate Oxide Structure / 공저 Hoon Sang Choi,Geun-Sik Lim,Jong Han Lee
- 발행사항
- 서울 : 대한금속.재료학회, 2003.
- 형태사항
- pp. 293-298
- 키워드
- GROWTH CHARACTERIZATIONOF AL₂O₃THIN FILMS BUFFER INSULATOR PTSRBI₂NB₂O0AL₂O₃SI FERROELECTRIC GATE OXIDE STRUCTURE
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60017784
MARC
008000108s2003 ULKa a ENG■022 ▼a12259438
■245 ▼aGrowth and Characterizationof Al₂O₃Thin Films for the Buffer Insulator in Pt/SrBi₂Nb₂O0/Al₂O₃/Si Ferroelectric Gate Oxide Structure▼d공저 Hoon Sang Choi,Geun-Sik Lim,Jong Han Lee
■260 ▼a서울▼b대한금속.재료학회▼c2003.
■300 ▼app. 293-298
■653 ▼aGROWTH▼aCHARACTERIZATIONOF▼aAL₂O₃THIN▼aFILMS▼aBUFFER▼aINSULATOR▼aPTSRBI₂NB₂O0AL₂O₃SI▼aFERROELECTRIC▼aGATE▼aOXIDE▼aSTRUCTURE
■700 ▼aHoon Sang Choi,Geun-Sik Lim,Jong Han Lee
■773 ▼tMetals and Materials▼gVOL.9 NO.3 (2003 JUNE)▼d2003, 06
■SIS ▼aS009198▼b60013551▼h8▼s2
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