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Effect of Bias on the As-Deposited Grain Structure of Cr Thin Film
Effect of Bias on the As-Deposited Grain Structure of Cr Thin Film
상세정보
MARC
008000108s2003 ULKa a ENG■022 ▼a12259438
■245 ▼aEffect of Bias on the As-Deposited Grain Structure of Cr Thin Film▼d공저 J.K.Park,J.H.Kim.J.Choy
■260 ▼a서울▼b대한금속.재료학회▼c2003.
■300 ▼app. 115-120
■653 ▼aEFFECT▼aBIAS▼aASDEPOSITED▼aGRAIN▼aSTRUCTURE▼aCR▼aFILM
■700 ▼aJ.K.Park,J.H.Kim.J.Choy
■773 ▼tMetals and Materials▼gVOL.9 NO.2 (2003 APRIL)▼d2003, 04
■SIS ▼aS009197▼b60013551▼h8▼s2


