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Dielectric Properties of Ta₂O5 Thin Films Deposited onto Ti and TiO₂Layer
Dielectric Properties of Ta₂O5 Thin Films Deposited onto Ti and TiO₂Layer
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MARC
008000108s2002 ULKa a ENG■022 ▼a12259438
■245 ▼aDielectric Properties of Ta₂O5 Thin Films Deposited onto Ti and TiO₂Layer▼d공저 In Sung Kim,Soon Jong Jeong,Jae Sung Song
■260 ▼a서울▼b대한금속.재료학회▼c2002.
■300 ▼app. 577-582
■653 ▼aDIELECTRIC▼aPROPERTIES▼aTA₂O5▼aFILMS▼aDEPOSITED▼aTIO₂LAYER
■700 ▼aIn Sung Kim,Soon Jong Jeong,Jae Sung Song
■773 ▼tMetals and Materials▼gVOL.8 NO.6 (2002 DECEMBER)▼d2002, 12
■SIS ▼aS009195▼b60013551▼h8▼s2


