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Effect of Rinsing and Drying on Silicon Surface Cleaning for Epitaxial Growth
Effect of Rinsing and Drying on Silicon Surface Cleaning for Epitaxial Growth / 공저 Hyoun...
Effect of Rinsing and Drying on Silicon Surface Cleaning for Epitaxial Growth

Detailed Information

자료유형  
 기사
ISSN  
12259438
서명/저자  
Effect of Rinsing and Drying on Silicon Surface Cleaning for Epitaxial Growth / 공저 Hyoun Woo Kim,Kwang-Sik Kim
발행사항  
서울 : 대한금속.재료학회, 2002.
형태사항  
pp. 463-468
키워드  
EFFECT RINSING DRYING SILICON SURFACE CLEANING EPITAXIAL GROWTH
기타저자  
Hyoun Woo Kim,Kwang-Sik Kim
기본자료저록  
Metals and Materials : VOL.8 NO.5 (2002 OCTOBER) 2002, 10
모체레코드  
모체정보확인
Control Number  
kjul:60017661

MARC

 008000108s2002        ULKa    a                          ENG
■022    ▼a12259438
■245    ▼aEffect  of  Rinsing  and  Drying  on  Silicon  Surface  Cleaning  for  Epitaxial  Growth▼d공저  Hyoun  Woo  Kim,Kwang-Sik  Kim
■260    ▼a서울▼b대한금속.재료학회▼c2002.
■300    ▼app.  463-468
■653    ▼aEFFECT▼aRINSING▼aDRYING▼aSILICON▼aSURFACE▼aCLEANING▼aEPITAXIAL▼aGROWTH
■700    ▼aHyoun  Woo  Kim,Kwang-Sik  Kim
■773    ▼tMetals  and  Materials▼gVOL.8  NO.5  (2002  OCTOBER)▼d2002,  10
■SIS    ▼aS009194▼b60013551▼h8▼s2

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