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The Fabrication of Micro-Heaters with Low-Power Consumption Using SOI and Trence Structures
The Fabrication of Micro-Heaters with Low-Power Consumption Using SOI and Trence Structures
Detailed Information
- Material Type
- 기사
- ISSN
- 12259438
- Title/Author
- The Fabrication of Micro-Heaters with Low-Power Consumption Using SOI and Trence Structures / 저 Gwiy-Sang Chung
- Publish Info
- 서울 : 대한금속.재료학회, 2002.
- Material Info
- pp. 347-352
- Index Term-Uncontrolled
- FABRICATION MICROHEATERS LOWPOWER CONSUMPTION USING SOI TRENCE STRUCTURES
- Added Entry-Personal Name
- Gwiy-Sang Chung
- Host Item Entry
- Metals and Materials : VOL.8 NO.4 (2002 AUGUST) 2002, 08
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60017642
MARC
008000108s2002 ULKa a ENG■022 ▼a12259438
■245 ▼aThe Fabrication of Micro-Heaters with Low-Power Consumption Using SOI and Trence Structures▼d저 Gwiy-Sang Chung
■260 ▼a서울▼b대한금속.재료학회▼c2002.
■300 ▼app. 347-352
■653 ▼aFABRICATION▼aMICROHEATERS▼aLOWPOWER▼aCONSUMPTION▼aUSING▼aSOI▼aTRENCE▼aSTRUCTURES
■700 ▼aGwiy-Sang Chung
■773 ▼tMetals and Materials▼gVOL.8 NO.4 (2002 AUGUST)▼d2002, 08
■SIS ▼aS009193▼b60013551▼h8▼s2
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