MARC

 008000107s2002        ULKa    a                          ENG
■022    ▼a12259438
■245    ▼aStudy  of  Oxygen  and  Carbon  Species  on  Si  Substrate  DUring  In-Situ  Cleaning  Prior  to  High-Quality  Epitaxial  Deposition▼d공저  Hyoun-Woo  Kim,Kwang-Sik  Kim
■260    ▼a서울▼b대한금속.재료학회▼c2002.
■300    ▼app.  183-190
■653    ▼aSTUDY▼aOXYGEN▼aCARBON▼aSPECIES▼aSUBSTRATE▼aINSITU▼aCLEANING▼aPRIOR▼aHIGHQUALITY▼aEPITAXIAL▼aDEPOSITION
■700    ▼aHyoun-Woo  Kim,Kwang-Sik  Kim
■773    ▼tMetals  and  Materials▼gVOL.8  NO.2  (2002  APRIL)▼d2002,  04
■SIS    ▼aS009191▼b60013551▼h8▼s2

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